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Miniature diaphragm pumps with valves about the width of a human hair have been etched and assembled on silicon chips for moving fluid between reservoirs in micro-fluid systems. Advantages are easy fabrication, high reliability, and the capability for continuous pumping of pure fluids or fluids containing particulates/cellular material at flow rates of 2 to 2000 microliters/minute, and pressures up to approximately 4.75 meters of water.
